[PDF] Trace Analysis Of Specialty And Electronic Gases eBook

Author : William M. Geiger
Publisher : John Wiley & Sons
Page : 309 pages
File Size : 20,15 MB
Release : 2013-07-15
Category : Science
ISBN : 1118642570

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Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental techniques available for specialty and electronic gas analysis. Moreover, the book details the advantages and disadvantages of each technique, steering readers away from common pitfalls. Featuring contributions from leading analytical and industrial chemists, Trace Analysis of Specialty and Electronic Gases covers a wide range of practical industrial applications. The book begins with the historical development of gas analysis and then focuses on particular subjects or techniques such as: Metals sampling and ICP-MS analysis Improvements in FTIR spectroscopy Water vapor analysis techniques New infrared laser absorption spectroscopy approaches GC/MS, GC/AED, and GC-ICP-MS techniques Gas chromatography columns Atmospheric pressure ionization mass spectrometry Lastly, the book examines gas mixtures and standards that are critical for instrument calibration. There are also two appendices offering information on fittings and material compatibility. With its thorough review of the literature and step-by-step guidance, Trace Analysis of Specialty and Electronic Gases enables researchers to take full advantage of the latest advances in gas analysis. Although the book's focus is the semiconductor and electronics industry, analytical chemists in other industries facing challenges with such issues as detection selectivity and sensitivity, matrix gas interference, and materials compatibility will also discover plenty of useful analytical approaches and techniques.

Author : Jeremiah D. Hogan
Publisher : Wiley-VCH Verlag GmbH
Page : 200 pages
File Size : 32,39 MB
Release : 1997
Category : Gases
ISBN : 9781560816713

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An introduction to the current analytical methods and equipment used for the study of the high-purity gases employed by the semiconductor and other related industries. The information available in this title becomes important as the semiconductor industry continues to move towards gas-phase reagents and the need for greater purity. Individuals dealing with the manufacturing of these devices needs to understand the technology available for modern gas analysis and quality control. This text includes a brief history of related forms of gas analysis, guidelines for performing gas analysis, and the knowledge needed to best perform required evaluations of gas systems and procedures.