[PDF] The Design And Fabrication Of Movable Micromachined Mirrors eBook

Author : Robert Conant
Publisher : Springer Science & Business Media
Page : 150 pages
File Size : 13,76 MB
Release : 2013-04-17
Category : Technology & Engineering
ISBN : 1475737645

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Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.

Author :
Publisher :
Page : 6 pages
File Size : 36,14 MB
Release : 1997
Category :
ISBN :

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This paper reports on the design and fabrication of a surface micromachined mirror system which is capable of producing the required moments to rotate a mirror structure out of the plane of fabrication. The planar structures created by surface micromachining present difficulties with developing a sufficient moment to move structures out of the x-y plane when actuated by those same planar structures. This is due to the short moment arms (in thickness direction z) that can be created in the fabrication process. The instability actuation technique reported here has general application to moving 2-dimensional structures up and out of the plane of their original fabrication. This technique can be applied to build truly 3-dimensional structures from a nearly 2-dimensional fabrication process. Surface micromachining can now be considered a 3-dimensional process where 3-dimensional structures are built by raising up structures by the instability actuation technique and making appropriate mechanical interconnections.

Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 23,19 MB
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 0387257861

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Author : Huikai Xie
Publisher : MDPI
Page : 217 pages
File Size : 32,48 MB
Release : 2018-05-04
Category : Technology & Engineering
ISBN : 3038428671

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This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines