[PDF] Surface Metrology For Micro And Nanofabrication eBook

Author : Wei Gao
Publisher : Elsevier
Page : 452 pages
File Size : 32,74 MB
Release : 2020-10-30
Category : Technology & Engineering
ISBN : 0128178515

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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Author : David J. Whitehouse
Publisher : CRC Press
Page : 982 pages
File Size : 50,56 MB
Release : 2002-12-01
Category : Science
ISBN : 1420034197

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The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit

Author : Richard Leach
Publisher : William Andrew
Page : 349 pages
File Size : 44,83 MB
Release : 2009-09-03
Category : Technology & Engineering
ISBN : 1437778321

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Author : David J. Whitehouse
Publisher : CRC Press
Page : 0 pages
File Size : 25,13 MB
Release : 2010-12-20
Category : Science
ISBN : 9781420082012

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Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications. Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines how the reduction in scale of size from macro to nano has affected all aspects of surface use and measurement. The book discusses how this shift has extended through characterization, standardization, manufacture, and performance. With nanotechnology now permeating the text, this edition covers new methods of production and measurement as well as new performance requirements. Described as the father of digital metrology by the American Society for Precision Engineering, author David J. Whitehouse explores the range of surface size scales—macro, micro, nano, atomic, and combinations of these. He examines traditional, structured, patterned, and free-form surfaces, emphasizing the growing need to understand the behavior of multiple surfaces. Still the definitive reference in the field, the second edition of this handbook continues to provide in-depth, extensive coverage of the engineering, physics, materials, mathematics, and computing involved in surface metrology and nanometrology. Nothing concerning current surface geometry escapes inclusion or scrutiny in this book.

Author : Wei Gao
Publisher : Walter de Gruyter GmbH & Co KG
Page : 655 pages
File Size : 18,30 MB
Release : 2021-11-22
Category : Technology & Engineering
ISBN : 3110542366

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This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way

Author : Hans Nørgaard Hansen
Publisher : MDPI
Page : 191 pages
File Size : 15,33 MB
Release : 2018-07-03
Category : Science
ISBN : 3038426040

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This book is a printed edition of the Special Issue "Micro/Nano Manufacturing" that was published in Micromachines

Author : Richard Leach
Publisher : Elsevier
Page : 384 pages
File Size : 38,99 MB
Release : 2014-05-17
Category : Science
ISBN : 1455777501

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Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations

Author : Kanak Kalita
Publisher : Walter de Gruyter GmbH & Co KG
Page : 228 pages
File Size : 32,36 MB
Release : 2024-06-17
Category : Technology & Engineering
ISBN : 3111335593

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This book unravels the intriguing interplay between macroscopic manufacturing processes and microscopic fabrication techniques. It dives into the sophisticated world of precision manufacturing, where high accuracy, controlled processes enable the production of complex components and products. It covers micro and nano fabrication, which revolutionizes conventional manufacturing by creating minuscule yet highly functional parts, some even smaller than the width of a human hair. This book explores various topics, from precise machining techniques to nanoimprint technology, reflecting the vast breadth and depth of this field. The aim is to provide readers with a comprehensive understanding of how these micro and macro scales intertwine, opening new frontiers in manufacturing. By showcasing the latest research findings and their practical applications, this book elucidates the enormous potential and implications of this burgeoning field. The contents are laid out in a user-friendly manner to communicate complex ideas in an accessible, engaging way, making it a valuable resource for anyone curious about the next big leap in manufacturing technology.

Author : David J. Whitehouse
Publisher : Taylor & Francis
Page : 1015 pages
File Size : 46,24 MB
Release : 2023-03-17
Category : Science
ISBN : 1351442074

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Written by the leading authority in the subject, Handbook of Surface Metrology covers every conceivable aspect of measuring and characterizing a surface. Focusing both on theory and practice, the book provides useful guidelines for the design of precision instruments and presents data on the functional importance of surfaces. It also clearly explains the essential theory relevant to surface metrology. The book defines most terms and parameters according to national and international standards. Many examples and illustrations are drawn from the esteemed author's large fund of groundbreaking research work. This unparalleled, all-encompassing "metrology bible" is beneficial for engineering postgraduate students and researchers involved in tribology, instrumentation, data processing, and metrology.

Author : Graham T. Smith
Publisher : Springer Science & Business Media
Page : 336 pages
File Size : 48,61 MB
Release : 2013-04-17
Category : Technology & Engineering
ISBN : 1447138147

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The subject of this book is surface metrology, in particular two major aspects: surface texture and roundness. It has taken a long time for manufacturing engineers and designers to realise the usefulness of these features in quality of conformance and quality of design. Unfortunately this awareness has come at a time when engineers versed in the use and specification of surfaces are at a premium. Traditionally surface metrology usage has been dictated by engineers who have served long and demanding apprenticeships, usually in parallel with studies leading to technician-level qualifications. Such people understood the processes and the achievable accuracies of machine tools, thereby enabling them to match production capability with design requirements. This synergy, has been made possible by the understanding of adherence to careful metrological procedures and a detailed knowledge of surface measuring instruments and their operation, in addition to wider inspection room techniques. With the demise in the UK of polytechnics and technical colleges, this source of skilled technicians has all but dried up. The shortfall has been made up of semi skilled craftsmen, or inexperienced graduates who cannot be expected to satisfy tradition al or new technology needs. Miniaturisation, for example, has had a pro found effect. Engineering parts are now routinely being made with nanometre surface texture and fiatness. At these molecular and atomic scales, the engineer has to be a physicist.