[PDF] Silicon Compatible Materials Processes And Technologies For Advanced Integrated Circuits And Emerging Applications 6 eBook

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Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 2

Author : Electrochemical Society
Publisher : ECS Transactions
Page : 265 pages
File Size : 13,47 MB
Release : 2012-04
Category :
ISBN : 9781566779586

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This issue of ECS Transactions covers emerging materials, process and technology options for large-area silicon wafers to enhance advanced IC performance or to enable revolutionary device structures with entirely new functionalities. Topics : high-mobility channel materials, (e.g. strained Si/Ge, compound semiconductors and graphene), high-performance gate stacks and low-resistivity junctions and contacts on new, Si-compatible materials; new materials and processes for 3-D (TSV) integration ; synthesis of nano-structures including wires, pores and membranes of Si-compatible materials; novel MEMS/NEMS structures and their integration with the mainstream Si-IC technology.

Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9

Author : F. Roozeboom
Publisher : The Electrochemical Society
Page : 176 pages
File Size : 23,44 MB
Release : 2019-05-17
Category : Science
ISBN : 1607688689

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This issue of ECS Transactions includes papers based on presentations from the symposium "Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9," originally held at the 235th ECS Meeting in Dallas, Texas, May 26-30, 2019.