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Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 2

Electrochemical Society
Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 2 by Electrochemical Society PDF

Author : Electrochemical Society
Publisher : ECS Transactions
Page : 265 pages
File Size : 44,70 MB
Release : 2012-04
Category :
ISBN : 9781566779586

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This issue of ECS Transactions covers emerging materials, process and technology options for large-area silicon wafers to enhance advanced IC performance or to enable revolutionary device structures with entirely new functionalities. Topics : high-mobility channel materials, (e.g. strained Si/Ge, compound semiconductors and graphene), high-performance gate stacks and low-resistivity junctions and contacts on new, Si-compatible materials; new materials and processes for 3-D (TSV) integration ; synthesis of nano-structures including wires, pores and membranes of Si-compatible materials; novel MEMS/NEMS structures and their integration with the mainstream Si-IC technology.