Author : D. Harame
Publisher : The Electrochemical Society
Page : 1066 pages
File Size : 44,33 MB
Release : 2010-10
Category : Science
ISBN : 1566778255
Advanced semiconductor technology is depending on innovation and less on "classical" scaling. SiGe, Ge, and Related Compounds has become a key component in the arsenal in improving semiconductor performance. This symposium discusses the technology to form these materials, process them, FET devices incorporating them, Surfaces and Interfaces, Optoelectronic devices, and HBT devices.