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Scanning Probe Microscopy Based 3D Nanolithography

Author : Logan Swartz
Publisher :
Page : pages
File Size : 31,33 MB
Release : 2018
Category :
ISBN : 9780438627529

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Three dimensional (3D) printing has been an active area of research and development due to its capability to produce 3D objects by design. Miniaturization and improvement of spatial resolution are major challenges in current 3D printing technology development. This dissertation reports advances in bringing 3D nanolithography to the nanometer scale using scanning probe microscopy (SPM). SPM uses nanometer scale sharp tips to probe localized tip material interactions at the atomic and/or molecular level. Taking advantage of the interactions to instead print materials, in conjunction with SPM’s nanometer precision piezo based positioning systems and local surface chemistry, we have been able to develop methods to advance 3D printing to 3D nanolithography/nanoprinting. Three methods were developed. The first presented culminated in the first patented, 3D nanoprinter. It involves directly delivering polyelectrolyte complex materials layer-by-layer using an atomic force microscopy (AFM) probe. This enabled creation of 3D nanostructures with nanometer precision in all three dimensions. The second method describes development of a new technique for near-field scanning optical microscopy (NSOM) nanolithography. NSOM lithography uses an SPM probe as a local light source to break the diffraction limit to perform photolithography. We have created new versions of these probes by developing ways to attach fluorescent nanoparticles to the end of AFM probes. Then using the probes, we developed a method for nanoparticle modified probe NSOM nanolithography. The third method is a convenient way to modify with in situ control AFM probes to have a flat surface/plateau at their end. These plateau probes, mounted on an AFM, are useful for compression studies to measure the created nanostructures’ nanomechanical properties. Also plateau probes provides a uniform surface to attach nanoparticles in order to create new probes for the nanoparticle modified probe NSOM nanolithography method, ensuring the attached particles are the furthest protrusion of the tips.

Scanning Probe Microscopy

Author : Nikodem Tomczak
Publisher : World Scientific
Page : 277 pages
File Size : 49,97 MB
Release : 2011
Category : Science
ISBN : 9814324760

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Scanning Probe Microscopy (SPM) is the enabling tool for nano(bio)technology, which has opened new vistas in many interdisciplinary research areas. Concomitant with the developments in SPM instrumentation and techniques are new and previously unthought-of opportunities in materials nanofabrication and characterisation. In particular, the developments in addressing and manipulating matter at the level of single atoms or molecules, and studies of biological materials (e.g. live cells, or cell membranes) result in new and exciting discoveries. The rising importance of SPM demands a concise treatment in the form of a book which is accessible to interdisciplinary practitioners. This book highlights recent advances in the field of SPM with sufficient depth and breadth to provide an intellectually stimulating overview of the current state of the art. The book is based on a set of carefully selected original works from renowned contributors on topics that range from atom technology, scanning tunneling spectroscopy of self-assembled nanostructures, SPM probe fabrication, scanning force microscopy applications in biology and materials science down to the single molecule level, novel scanning probe techniques, and nanolithography. The variety of topics underlines the strong interdisciplinary character of SPM related research and the combined expertise of the contributors gives us a unique opportunity to discuss possible future trends in SPM related research. This makes the book not merely a collection of already published material but an enlightening insight into cutting edge research and global SPM research trends.

Scanning Probe Microscopy

Author : Ernst Meyer
Publisher : Springer Science & Business Media
Page : 215 pages
File Size : 12,34 MB
Release : 2013-03-14
Category : Science
ISBN : 3662098016

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Written by three leading experts in the field, this textbook describes and explains all aspects of the scanning probe microscopy. Emphasis is placed on the experimental design and procedures required to optimize the performance of the various methods. Scanning Probe Microscopy covers not only the physical principles behind scanning probe microscopy but also questions of instrumental designs, basic features of the different imaging modes, and recurring artifacts. The intention is to provide a general textbook for all types of classes that address scanning probe microscopy. Third year undergraduates and beyond should be able to use it for self-study or as textbook to accompany a course on probe microscopy. Furthermore, it will be valuable as reference book in any scanning probe microscopy laboratory. Novel applications and the latest important results are also presented, and the book closes with a look at the future prospects of scanning probe microscopy, also discussing related techniques in nanoscience. Ideally suited as an introduction for graduate students, the book will also serve as a valuable reference for practising researchers developing and using scanning probe techniques.

Nano Lithography

Author : Stefan Landis
Publisher : John Wiley & Sons
Page : 424 pages
File Size : 25,47 MB
Release : 2013-03-04
Category : Technology & Engineering
ISBN : 1118621700

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Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields. Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS). This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.

Scanning Probe Microscopy

Author : Sergei V. Kalinin
Publisher : Springer
Page : 0 pages
File Size : 44,43 MB
Release : 2006-12-18
Category : Technology & Engineering
ISBN : 9780387286679

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This volume will be devoted to the technical aspects of electrical and electromechanical SPM probes and SPM imaging on the limits of resolution, thus providing technical introduction into the field. This volume will also address the fundamental physical phenomena underpinning the imaging mechanism of SPMs.

Scanning Probe Microscopy in Nanoscience and Nanotechnology

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
Page : 975 pages
File Size : 34,20 MB
Release : 2010-01-22
Category : Technology & Engineering
ISBN : 3642035353

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This book presents the physical and technical foundation of the state-of-the-art in applied scanning probe techniques. It constitutes a comprehensive overview of SPM applications. The chapters are written by leading researchers and application scientists.

Nanolithography by Scanning Probes for Biorecognition

Author : Javier Martinez
Publisher :
Page : 0 pages
File Size : 27,68 MB
Release : 2020
Category : Technology & Engineering
ISBN :

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With the invention of the scanning tunneling microscope (STM) and subsequently with the atomic force microscope (AFM), the human being was able to enter in the nanoscale world. At first, these devices were only used for imaging samples, but with a small modification of its electronics, they can be used for a precise and controlled manipulation of the scanning probe, creating different types of nanolithographed motifs. The development of this type of lithography has allowed the manufacture of nanometric-scale structures that have led spectacular advances in the field of nanotechnology. In this book chapter, we present the most innovative and reliable probe nanolithography techniques. All of them are based on the spatial confinement of a chemical reaction within a nanometric size region of the sample surface. In that way, 2D or even 3D nanostructures can be fabricated. The full potential of probe nanolithography techniques is demonstrated by showing a range of applications such as the controlled deposition of molecules with high precision or nanotransistors that can be used as sensors for biorecognition processes.

Scanning Probe Microscopy in Nanoscience and Nanotechnology 2

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
Page : 823 pages
File Size : 23,43 MB
Release : 2010-12-17
Category : Technology & Engineering
ISBN : 3642104975

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This book presents the physical and technical foundation of the state of the art in applied scanning probe techniques. It constitutes a timely and comprehensive overview of SPM applications. The chapters in this volume relate to scanning probe microscopy techniques, characterization of various materials and structures and typical industrial applications, including topographic and dynamical surface studies of thin-film semiconductors, polymers, paper, ceramics, and magnetic and biological materials. The chapters are written by leading researchers and application scientists from all over the world and from various industries to provide a broader perspective.

Scanning Probe Microscopy¿in Industrial Applications

Author : Dalia G. Yablon
Publisher : John Wiley & Sons
Page : 337 pages
File Size : 11,89 MB
Release : 2013-10-24
Category : Technology & Engineering
ISBN : 111872304X

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Describes new state-of-the-science tools and their contribution to industrial R&D With contributions from leading international experts in the field, this book explains how scanning probe microscopy is used in industry, resulting in improved product formulation, enhanced processes, better quality control and assurance, and new business opportunities. Readers will learn about the use of scanning probe microscopy to support R&D efforts in the semiconductor, chemical, personal care product, biomaterial, pharmaceutical, and food science industries, among others. Scanning Probe Microscopy in Industrial Applications emphasizes nanomechanical characterization using scanning probe microscopy. The first half of the book is dedicated to a general overview of nanomechanical characterization methods, offering a complete practical tutorial for readers who are new to the topic. Several chapters include worked examples of useful calculations such as using Hertz mechanics with and without adhesion to model a contact, step-by-step instructions for simulations to guide cantilever selection for an experiment, and data analysis procedures for dynamic contact experiments. The second half of the book describes applications of nanomechanical characterization in industry, including: New formulation development for pharmaceuticals Measurement of critical dimensions and thin dielectric films in the semiconductor industry Effect of humidity and temperature on biomaterials Characterization of polymer blends to guide product formulation in the chemicals sector Unraveling links between food structure and function in the food industry Contributions are based on the authors' thorough review of the current literature as well as their own firsthand experience applying scanning probe microscopy to solve industrial R&D problems. By explaining the fundamentals before advancing to applications, Scanning Probe Microscopy in Industrial Applications offers a complete treatise that is accessible to both novices and professionals. All readers will discover how to apply scanning probe microscopy to build and enhance their R&D efforts.

Scanning Probe Microscopy in Nanoscience and Nanotechnology 3

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
Page : 634 pages
File Size : 24,87 MB
Release : 2012-10-24
Category : Science
ISBN : 3642254144

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This book presents the physical and technical foundation of the state of the art in applied scanning probe techniques. It constitutes a timely and comprehensive overview of SPM applications. The chapters in this volume relate to scanning probe microscopy techniques, characterization of various materials and structures and typical industrial applications, including topographic and dynamical surface studies of thin-film semiconductors, polymers, paper, ceramics, and magnetic and biological materials. The chapters are written by leading researchers and application scientists from all over the world and from various industries to provide a broader perspective.