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Chemical Mechanical Planarization in IC Device Manufacturing III

Author : Robert Leon Opila
Publisher : The Electrochemical Society
Page : 664 pages
File Size : 30,47 MB
Release : 2000
Category : Technology & Engineering
ISBN : 9781566772600

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This volume contains the proceedings of the third international symposium on Chemical Mechanical Planarization integrated circuit device manufacturing held at the 196th Meeting of the Electrochemical Society in Honolulu, Hawaii. ( October 20 -22 1999).

Index of Conference Proceedings

Author : British Library. Document Supply Centre
Publisher :
Page : 870 pages
File Size : 18,16 MB
Release : 2001
Category : Conference proceedings
ISBN :

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ULSI Process Integration

Author : Cor L. Claeys
Publisher : The Electrochemical Society
Page : 408 pages
File Size : 23,70 MB
Release : 1999
Category : Computers
ISBN : 9781566772419

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Chemical Mechanical Polishing in Silicon Processing

Author :
Publisher : Academic Press
Page : 325 pages
File Size : 49,6 MB
Release : 1999-10-29
Category : Science
ISBN : 0080864619

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Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded. Reflecting the truly interdisciplinary nature of the field that the series covers, the volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in modern industry.

The Cumulative Book Index

Author :
Publisher :
Page : 2348 pages
File Size : 16,30 MB
Release : 1998
Category : American literature
ISBN :

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A world list of books in the English language.

Chemical Mechanical Planarization VI

Author : Sudipta Seal
Publisher : The Electrochemical Society
Page : 370 pages
File Size : 13,22 MB
Release : 2003
Category : Technology & Engineering
ISBN : 9781566774048

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