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Micromachined Mirrors

Author : Robert Conant
Publisher : Springer Science & Business Media
Page : 150 pages
File Size : 42,16 MB
Release : 2013-04-17
Category : Technology & Engineering
ISBN : 1475737645

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Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Author : P. Rai-Choudhury
Publisher : SPIE Press
Page : 706 pages
File Size : 46,7 MB
Release : 1997
Category : Technology & Engineering
ISBN : 9780819423795

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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

MEMS Mirrors

Author : Huikai Xie
Publisher : MDPI
Page : 217 pages
File Size : 42,2 MB
Release : 2018-05-04
Category : Technology & Engineering
ISBN : 3038428671

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This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines

Diffractive Optics and Optical Microsystems

Author : S. Martellucci
Publisher : Springer Science & Business Media
Page : 406 pages
File Size : 36,82 MB
Release : 2013-06-29
Category : Science
ISBN : 1489914749

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Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996

Mems/Nems

Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 18,17 MB
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 0387257861

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Publications

Author : United States. National Bureau of Standards
Publisher :
Page : 548 pages
File Size : 33,18 MB
Release : 1975
Category : Government publications
ISBN :

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