Author : Hans H. Gatzen
Publisher : Springer
Page : 537 pages
File Size : 38,45 MB
Release : 2015-01-02
Category : Technology & Engineering
ISBN : 3662443953
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.