[PDF] Hermetically Encapsulated Fully Differential Breathe Mode Ring Resonators For Timing Applications eBook

Author : Shasha Wang
Publisher :
Page : pages
File Size : 18,17 MB
Release : 2013
Category :
ISBN :

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As modern electronic devices continue to miniaturize and integrate more functionality, silicon-based MEMS timing references are gaining more and more attention and are replacing quartz crystals in the $5 billion market. They offer a lot of advantages such as a small foot-print, low cost, low power consumption, etc. However, the performance (phase noise in particular) of MEMS-based timing references still needs improvement to outperform the well-established quartz crystals. This work presents a fully-differential breathe-mode ring resonators with a quality factor as high as 473,000 at 10MHz by minimizing air damping, anchor loss and thermo-elastic dissipation. This quality factor approaches the theoretical maximum quality factor set by the phonon-to-phonon scattering in the material. It is among the highest reported in literature. MEMS oscillators based on this breathe-mode ring resonator produce a -120dBc/Hz close-to-carrier (@1kHz offset) phase noise performance. In addition, ultra-narrow bandwidth breathe-mode ring filters are designed and fabricated based on this high Q breathe-mode ring resonator using mechanical coupling, achieving less than 0.05% bandwidth. However, due to the large transduction gap size (1.5μm) dictated by the "epi-seal" fabrication process, the motional impedance of the breathe-mode ring resonator is relatively high, causing poor oscillator phase noise performance. In this work, a modified "epi-seal" fabrication process employing surface micromachining combined with bulk micro-machining is performed, achieving a transduction gap size as small as 260nm, thereby reducing the motional impedance by six times and improving the phase noise performance by 15dB theoretically. In the last section, integrated CMOS-MEMS structures, including 10 and 25 MHz breathe-mode ring resonators and 850 kHz double ended tuning fork resonators integrated with CMOS trans-impedance amplifiers (TIAs), are designed and fabricated in the InvenSense Nasiri fabrication platform. This platform offers a great way to help bring good concepts to quick realization by opening the commercially proven MEMS fabrication platform to the public.

Author : George Xereas
Publisher :
Page : pages
File Size : 12,72 MB
Release : 2017
Category :
ISBN :

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"Quartz crystal-based oscillators have been employed for timing and frequency references applications since the 1950s. However, the quartz fabrication process imposes limitations in terms of robustness, size, cost, and direct on-chip integration with Complementary Metal-Oxide Semiconductor (CMOS) circuits. An unmatched infrastructure investment in advanced semiconductor foundries has allowed for the introduction of a new silicon based timing references, the MicroElectroMechanical Systems (MEMS) resonator. These new devices are able to provide superior timing performance while at the same time setting new standards in terms of robustness, power consumption and miniaturization. This work describes the fabrication of wafer-level vacuum-encapsulated silicon resonators fabricated in MEMS Integrated Design for Inertial Sensors (MIDIS), a commercial pure-play MEMS process, provided by Teledyne DALSA Semiconductor Inc. (TDSI). MIDIS offers a 30 [mu]m thick silicon device layer that is wafer-level vacuum encapsulated at 10 mTorr. The total leak rate equivalent is noted to be as low as 6.5 x 10−17 atm cm3/s, which provides an ultra-clean environment for the operation of the devices. The Lamé mode resonators developed in this work achieved a quality factor of 3.24 million at a resonance frequency of 6.89 MHz, resulting in the highest recorded f-Q product of 2.23e13 Hz for wafer-level vacuum-encapsulated silicon resonators. The device was integrated in a PCB based oscillator in order to build a high performance frequency reference that meets most Global System for Mobile Communications (GSM) specifications.Furthermore, low polarization voltage breath-mode ring resonators are presented here. The ring resonators are designed to operate with a low DC polarization voltage, starting at 5V, while providing a high frequency-Quality factor (f-Q) product. The vacuum packaging quality is evaluated using an automated testing setup over an extended time period. The fabricated devices had a resonant frequency of 10 MHz with the quality factor exceeding 8.4e4. Finally, this works presents wafer-level vacuum-encapsulated silicon resonators with transduction gap of 200 nm. The devices are fabricated in MIDIS where the default minimum transduction gap in the MIDIS process is 1.5 [mu]m. A gap reduction technique that relies on arc-welding is introduced here. The prototype Lamé mode resonators are encapsulated in an ultra-clean 10 mTorr vacuum cavity that ensures long-term stability. The Quality factor was measured to be 1.37 million at a resonance frequency of 6.89 MHz. With the narrower gap, the motional resistance of the resonators is reduced by a factor of 10 times." --

Author : Harmeet Bhugra
Publisher : Springer
Page : 423 pages
File Size : 23,10 MB
Release : 2017-01-09
Category : Technology & Engineering
ISBN : 3319286889

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Author : Andrea Leonardo Lacaita
Publisher : Cambridge University Press
Page : 9 pages
File Size : 39,30 MB
Release : 2007-06-28
Category : Technology & Engineering
ISBN : 1139466097

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The increasingly demanding performance requirements of communications systems, as well as problems posed by the continued scaling of silicon technology, present numerous challenges for the design of frequency synthesizers in modern transceivers. This book contains everything you need to know for the efficient design of frequency synthesizers for today's communications applications. If you need to optimize performance and minimize design time, you will find this book invaluable. Using an intuitive yet rigorous approach, the authors describe simple analytical methods for the design of phase locked loop (PLL) frequency synthesizers using scaled silicon CMOS and bipolar technologies. The entire design process, from system-level specification to layout, is covered comprehensively. Practical design examples are included, and implementation issues are addressed. A key problem-solving resource for practitioners in IC design, the book will also be of interest to researchers and graduate students in electrical engineering.

Author : Dominik G. Rabus
Publisher : Springer
Page : 270 pages
File Size : 47,2 MB
Release : 2007-04-26
Category : Science
ISBN : 3540687882

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The optical filter is resonator based. The required passband shape of ring resonator-filters can be custom designed by the use of configurations of various ring coupled resonators. This book describes the current state-of-the-art on these devices. It provides an in-depth knowledge of the simulation, fabrication and characterization of ring resonators for use as example filters, lasers, sensors.

Author : Walt Kester
Publisher : Newnes
Page : 977 pages
File Size : 50,63 MB
Release : 2005
Category : Computers
ISBN : 0750678410

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This complete update of a classic handbook originally created by Analog Devices and never previously published offers the most complete and up-to-date reference available on data conversion, from the world authority on the subject. It describes in depth the theory behind and the practical design of data conversion circuits. It describes the different architectures used in A/D and D/A converters - including many advances that have been made in this technology in recent years - and provides guidelines on which types are best suited for particular applications. It covers error characterization and testing specifications, essential design information that is difficult to find elsewhere. The book also contains a wealth of practical application circuits for interfacing and supporting A/D and D/A converters within an electronic system. In short, everything an electronics engineer needs to know about data converters can be found in this volume, making it an indispensable reference with broad appeal. The accompanying CD-ROM provides software tools for testing and analyzing data converters as well as a searchable pdf version of the text. * brings together a huge amount of information impossible to locate elsewhere. * many recent advances in converter technology simply aren't covered in any other book. * a must-have design reference for any electronics design engineer or technician

Author : Philip C. D. Hobbs
Publisher : John Wiley & Sons
Page : 750 pages
File Size : 11,67 MB
Release : 2011-09-20
Category : Technology & Engineering
ISBN : 111821109X

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Praise for the First Edition "Now a new laboratory bible for optics researchers has joined the list: it is Phil Hobbs's Building Electro-Optical Systems: Making It All Work." —Tony Siegman, Optics & Photonics News Building a modern electro-optical instrument may be the most interdisciplinary job in all of engineering. Be it a DVD player or a laboratory one-off, it involves physics, electrical engineering, optical engineering, and computer science interacting in complex ways. This book will help all kinds of technical people sort through the complexity and build electro-optical systems that just work, with maximum insight and minimum trial and error. Written in an engaging and conversational style, this Second Edition has been updated and expanded over the previous edition to reflect technical advances and a great many conversations with working designers. Key features of this new edition include: Expanded coverage of detectors, lasers, photon budgets, signal processing scheme planning, and front ends Coverage of everything from basic theory and measurement principles to design debugging and integration of optical and electronic systems Supplementary material is available on an ftp site, including an additional chapter on thermal Control and Chapter problems highly relevant to real-world design Extensive coverage of high performance optical detection and laser noise cancellation Each chapter is full of useful lore from the author's years of experience building advanced instruments. For more background, an appendix lists 100 good books in all relevant areas, introductory as well as advanced. Building Electro-Optical Systems: Making It All Work, Second Edition is essential reading for researchers, students, and professionals who have systems to build.

Author : Sergey Yurish
Publisher : Lulu.com
Page : 406 pages
File Size : 30,64 MB
Release : 2016-04-25
Category : Technology & Engineering
ISBN : 8460877043

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Sensors, Transducers, Signal Conditioning and Wireless (Book Series 'Advances in Sensors: Reviews', Vol. 3) is a premier sensor review source and contains 19 chapters with sensor related state-of-the-art reviews and descriptions of latest achievements written by 55 authors from academia and industry from 19 countries: Botswana, Canada, China, Finland, France, Germany, India, Jordan, Mexico, Portugal, Romania, Russia, Senegal, Serbia, South Africa, South Korea, UK, Ukraine and USA. Coverage includes current developments in physical sensors and transducers, chemical sensors, biosensors, sensing materials, signal conditioning energy harvesters and wireless sensor networks. This book ensures that readers will stay at the cutting edge of the field and get the right and effective start point and road map for the further researches and developments.

Author : Peter Spies
Publisher : CRC Press
Page : 588 pages
File Size : 30,95 MB
Release : 2015-06-01
Category : Science
ISBN : 9814303062

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This book describes the fundamentals and principles of energy harvesting and provides the necessary theory and background to develop energy harvesting power supplies. It explains the overall system design and gives quantitative assumptions on environmental energy. It explains different system blocks for an energy harvesting power supply and the trade-offs. The text covers in detail different energy transducer technologies such as piezoelectric, electrodynamic, and thermoelectric generators and solar cells from the material to the component level and explains the appropriate power management circuits required in these systems. Furthermore, it describes and compares storage elements such as secondary batteries and supercapacitors to select the most appropriate one for the application. Besides power supplies that use ambient energy, the book presents systems that use electromagnetic fields in the radio frequency range. Finally, it discusses different application fields and presents examples of self-powered electronic systems to illustrate the content of the preceding chapters.