[PDF] Handbook Of Thin Film Process Technology eBook

Author : Hartmut Frey
Publisher : Springer Science & Business Media
Page : 385 pages
File Size : 42,18 MB
Release : 2015-05-06
Category : Technology & Engineering
ISBN : 3642054307

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“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Author : Krishna Seshan
Publisher :
Page : 629 pages
File Size : 23,75 MB
Release : 2002
Category : Chemical vapor deposition
ISBN : 9786612253195

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The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Author : Kiyotaka Wasa
Publisher : William Andrew
Page : 657 pages
File Size : 18,56 MB
Release : 2012-12-31
Category : Technology & Engineering
ISBN : 1437734847

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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Author : D Glocker
Publisher : CRC Press
Page : 322 pages
File Size : 43,91 MB
Release : 2018-01-18
Category : Science
ISBN : 1351089692

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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Author : Milton Ohring
Publisher : Academic Press
Page : 744 pages
File Size : 32,84 MB
Release : 1992
Category : Science
ISBN : 9780125249904

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Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.

Author : Krishna Seshan
Publisher : William Andrew
Page : 472 pages
File Size : 25,80 MB
Release : 2018-02-23
Category : Technology & Engineering
ISBN : 0128123125

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Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics

Author : D Glocker
Publisher : CRC Press
Page : 135 pages
File Size : 48,22 MB
Release : 2018-01-18
Category : Science
ISBN : 1351081241

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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Author : John L. Vossen
Publisher : Elsevier
Page : 577 pages
File Size : 12,5 MB
Release : 2012-12-02
Category : Technology & Engineering
ISBN : 0323138985

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Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.

Author : S. Ismat Shah
Publisher :
Page : pages
File Size : 46,70 MB
Release : 2018
Category : Surfaces (Technology)
ISBN : 9781351098137

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"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques."--Provided by publisher.

Author : Peter M. Martin
Publisher : William Andrew
Page : 932 pages
File Size : 13,94 MB
Release : 2009-12-01
Category : Technology & Engineering
ISBN : 0815520328

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This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.