Author : P. D. Prewett
Publisher : John Wiley & Sons
Page : 354 pages
File Size : 33,45 MB
Release : 1991-10-02
Category : Science
ISBN :
Provides an up-to-date review and analysis of liquid metal ion sources and their applications. The contents range from a discussion of the fundamental physics underlying operation of the liquid metal ion sources, through the technical details of their construction and manufacture to their performance characteristics. Their use in focused ion beam systems is covered in detail, including a discussion of the fundamentals of ion optical focusing column design and the various microengineering applications.