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Author : Materials Research Society. Meeting
Publisher :
Page : 318 pages
File Size : 48,56 MB
Release : 2004-09
Category : Science
ISBN :
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2004, presents advances in fundamental understanding, development, and applications of chemical-mechanical polishing (CMP).
Author : Duane S. Boning
Publisher : Cambridge University Press
Page : 310 pages
File Size : 41,14 MB
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 9781107409194
While now in widespread use in integrated circuit fabrication, chemical-mechanical polishing (CMP) is also starting to appear in a surprisingly wide range of applications, with a growing variety of processes and technologies. This book, first published in 2004, presents advances in fundamental understanding, development, and applications of CMP. CMP of both conventional and nonconventional materials are discussed. Conventional materials polished using CMP include silicon, oxides and nitrides, polysilicon, and other insulating films, as well as copper, tungsten, barrier films, and other metal films. Nonconventional materials include those of increasing importance in advanced semiconductor, MEMS, and nanotechnologies, such as low-k dielectrics and polymer, nickel, and ruthenium films. CMP in IC fabrication continues to pose substantial problems - for virgin silicon wafer preparation, shallow-trench isolation (STI) structures, and poly or other deep-trench structure formation, as well as copper and low-k metal interconnect. New developments in CMP pads and slurries are presented. Novel polishing methods and are described. Advances in CMP process understanding and modeling are also highlighted.
Author : A. Kumar
Publisher :
Page : 330 pages
File Size : 45,17 MB
Release : 2005-07-19
Category : Technology & Engineering
ISBN :
Technology requirements associated with the progressive scaling of devices for future technology nodes, coupled with the aggressive introduction of new materials, places tremendous demands on chemical-mechanical polishing. The goal of this 2005 book, which is part of a popular series from MRS, is to bring together experts from a broad spectrum of research and technology groups currently working on CMP, to review advances made, and to offer a comprehensive discussion of future challenges that must be overcome. The book shows trends in the development of consumables, process modules, tool designs, process integration, modeling, defect characterization, and metrology. Topics include: planarization processes and applications; consumables -CMP pads and slurries; CMP equipment and metrology; and CMP modeling and simulation.
Author : Materials Research Society. Meeting
Publisher :
Page : 312 pages
File Size : 37,21 MB
Release : 2001-12-14
Category : Science
ISBN :
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This volume was first published in 2001.
Author : Materials Research Society. Meeting
Publisher :
Page : 304 pages
File Size : 47,11 MB
Release : 2004-07-27
Category : Technology & Engineering
ISBN :
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author : S. V. Babu
Publisher :
Page : 304 pages
File Size : 13,6 MB
Release : 2000-02-10
Category : Technology & Engineering
ISBN :
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author :
Publisher :
Page : 392 pages
File Size : 50,1 MB
Release : 2004
Category : Surfaces (Technology)
ISBN :
Author : Materials Research Society. Meeting
Publisher :
Page : 328 pages
File Size : 50,64 MB
Release : 2005-09-09
Category : Technology & Engineering
ISBN :
Solar-cell performance is critically dependent on the optical and electrical properties of their constituent materials. In order to obtain significant improvements in performance for future generations of photovoltaic devices, it will be necessary to either improve the properties of existing materials or engineer new materials and device structures. This book focuses on materials issues and advances for photovoltaics. Topics include: dye-sensitized solar cells; nanoparticle/hybrid solar cells; polymer-based devices; small molecule-based devices; III-V semiconductors; II-VI semiconductors and transparent conducting oxides and silicon thin films.
Author : Materials Research Society. Meeting
Publisher :
Page : 586 pages
File Size : 29,95 MB
Release : 2005-06-02
Category : Science
ISBN :
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author :
Publisher :
Page : 408 pages
File Size : 44,23 MB
Release : 2005
Category : Ions
ISBN :