[PDF] Advances And Challenges In Chemical Mechanical Planarization Volume 991 eBook

Author : Gerfried Zwicker
Publisher : Cambridge University Press
Page : 388 pages
File Size : 32,44 MB
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 9781107408708

GET BOOK

Chemical mechanical planarization (CMP) has been a leading-edge technology in semiconductor processing for the past 15−20 years. A successful CMP process is based in fundamental science across the disciplines of mechanical engineering, chemical engineering, colloid science, materials science and chemistry. Traditionally, the MRS Spring Meeting serves as a nexus for multidisciplinary interaction and discussion between CMP researchers in both industry and academia. The papers in this book are from the 2007 MRS Spring Meeting and address the fluid and wear mechanics that occur when using CMP tools and pad/slurry consumables, as well as the surface mechanisms required for effective post-CMP cleaning. It also focuses on new successes and challenges in technologies such as electrochemical mechanical planarization (eCMP), three-dimensional integration and advanced CMP process modeling and control strategies.

Author : S. Ashok
Publisher :
Page : 400 pages
File Size : 34,37 MB
Release : 2007-09-10
Category : Technology & Engineering
ISBN :

GET BOOK

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2007, focuses on the application of defects and impurities in current and emerging semiconductor technologies.

Author : Krishna Seshan
Publisher : William Andrew
Page : 472 pages
File Size : 17,49 MB
Release : 2018-02-23
Category : Technology & Engineering
ISBN : 0128123125

GET BOOK

Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics

Author : Qinghuang Lin
Publisher :
Page : 366 pages
File Size : 24,55 MB
Release : 2007-09-12
Category : Science
ISBN :

GET BOOK

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : Daryush Ila
Publisher :
Page : 264 pages
File Size : 44,91 MB
Release : 2007-09-05
Category : Science
ISBN :

GET BOOK

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : Christophe Barbé
Publisher :
Page : 344 pages
File Size : 33,92 MB
Release : 2008-05-28
Category : Technology & Engineering
ISBN :

GET BOOK

The field of organic/inorganic hybrids has evolved significantly, providing materials with increasing architectural complexities and functionalities. Scientists involved in this field are gradually moving from building materials using a classical molecular approach (e.g. polymerization) to assembling materials on the nanoscale, using a variety of innovative strategies which can vary from the assembly of DNA motifs, to the formation of mesoporous materials by spinodal decomposition, or the use of nanoparticles or oxoclusters as nanobuilding blocks for building complex structures such as nacre-like transition metal oxides. This precise control over the materials architecture also adds functionality to the hybrid materials, whether it is for designing special membranes for phase separation and chromatography or thin films for photonic or magnetic applications. This book presents contributions from researchers worldwide and discusses organosiloxane-based materials; mesoporous materials and films; layered materials; surface and interface modification and characterization; controlled release and biological applications; nanoparticles synthesis and assembly; nanocomposites and new concepts.

Author : Imin Kao
Publisher : John Wiley & Sons
Page : 304 pages
File Size : 18,15 MB
Release : 2021-01-11
Category : Technology & Engineering
ISBN : 0470061219

GET BOOK

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.