[PDF] Silicon Compatible Materials Processes And Technologies For Advanced Integrated Circuits And Emerging Applications 2 eBook

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Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 2

Electrochemical Society
Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 2 by Electrochemical Society PDF

Author : Electrochemical Society
Publisher : ECS Transactions
Page : 265 pages
File Size : 29,55 MB
Release : 2012-04
Category :
ISBN : 9781566779586

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This issue of ECS Transactions covers emerging materials, process and technology options for large-area silicon wafers to enhance advanced IC performance or to enable revolutionary device structures with entirely new functionalities. Topics : high-mobility channel materials, (e.g. strained Si/Ge, compound semiconductors and graphene), high-performance gate stacks and low-resistivity junctions and contacts on new, Si-compatible materials; new materials and processes for 3-D (TSV) integration ; synthesis of nano-structures including wires, pores and membranes of Si-compatible materials; novel MEMS/NEMS structures and their integration with the mainstream Si-IC technology.

Microelectromechanical Systems

Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Microelectromechanical Systems by Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems PDF

Author : Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Publisher : National Academies Press
Page : 76 pages
File Size : 25,28 MB
Release : 1997-12-15
Category : Technology & Engineering
ISBN : 0309591511

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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.