[PDF] Ferroelectricity In Doped Hafnium Oxide eBook

Author : Uwe Schroeder
Publisher : Woodhead Publishing
Page : 570 pages
File Size : 22,50 MB
Release : 2019-03-27
Category : Technology & Engineering
ISBN : 0081024312

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Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices covers all aspects relating to the structural and electrical properties of HfO2 and its implementation into semiconductor devices, including a comparison to standard ferroelectric materials. The ferroelectric and field-induced ferroelectric properties of HfO2-based films are considered promising for various applications, including non-volatile memories, negative capacitance field-effect-transistors, energy storage, harvesting, and solid-state cooling. Fundamentals of ferroelectric and piezoelectric properties, HfO2 processes, and the impact of dopants on ferroelectric properties are also extensively discussed in the book, along with phase transition, switching kinetics, epitaxial growth, thickness scaling, and more. Additional chapters consider the modeling of ferroelectric phase transformation, structural characterization, and the differences and similarities between HFO2 and standard ferroelectric materials. Finally, HfO2 based devices are summarized. Explores all aspects of the structural and electrical properties of HfO2, including processes, modelling and implementation into semiconductor devices Considers potential applications including FeCaps, FeFETs, NCFETs, FTJs and more Provides comparison of an emerging ferroelectric material to conventional ferroelectric materials with insights to the problems of downscaling that conventional ferroelectrics face

Author : Uwe Schroeder
Publisher : Woodhead Publishing
Page : 0 pages
File Size : 29,54 MB
Release : 2019-03-29
Category : Technology & Engineering
ISBN : 9780081024300

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Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices covers all aspects relating to the structural and electrical properties of HfO2 and its implementation into semiconductor devices, including a comparison to standard ferroelectric materials. The ferroelectric and field-induced ferroelectric properties of HfO2-based films are considered promising for various applications, including non-volatile memories, negative capacitance field-effect-transistors, energy storage, harvesting, and solid-state cooling. Fundamentals of ferroelectric and piezoelectric properties, HfO2 processes, and the impact of dopants on ferroelectric properties are also extensively discussed in the book, along with phase transition, switching kinetics, epitaxial growth, thickness scaling, and more. Additional chapters consider the modeling of ferroelectric phase transformation, structural characterization, and the differences and similarities between HFO2 and standard ferroelectric materials. Finally, HfO2 based devices are summarized.

Author : Tony Schenk
Publisher : BoD – Books on Demand
Page : 194 pages
File Size : 33,47 MB
Release : 2017-03-15
Category : Technology & Engineering
ISBN : 3743127296

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In 2011, Böscke et al. reported the unexpected discovery of ferroelectric properties in hafnia based thin films, which has since initiated many further studies and revitalized research on the topic of ferroelectric memories. In spite of many efforts, the unveiling of the fundamentals behind this surprising discovery has proven rather challenging. In this work, the originally claimed Pca21 phase is experimentally proven to be the root of the ferroelectric properties and the nature of this ferroelectricity is classified in the frame of existing concepts of ferroelectric materials. Parameters to stabilize this polar phase are examined from a theoretical and fabrication point of view. With these very basic questions addressed, the application relevant electric field cycling behavior is studied. The results of first-order reversal curves, impedance spectroscopy, scanning transmission electron microscopy and piezoresponse force microscopy significantly advance the understanding of structural mechanisms underlying wake-up, fatigue and the novel phenomenon of split-up/merging of transient current peaks. The impact of field cycling behavior on applications like ferroelectric memories is highlighted and routes to optimize it are derived. These findings help to pave the road for a successful commercialization of hafnia based ferroelectrics.

Author : Fei Huang (Researcher in electrical engineering)
Publisher :
Page : 0 pages
File Size : 50,93 MB
Release : 2023
Category :
ISBN :

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As data processing and storage needs continue to grow at a rapid pace, the development of innovative memory technologies is crucial. The discovery of ferroelectricity in hafnia (HfO2)-based materials has garnered significant attention in both academia and industry, owing to their potential to revolutionize non-volatile memory (NVM) technology and enable novel computing architectures. HfO2-based ferroelectric materials offer advantages over conventional perovskite oxides, such as low-temperature synthesis and conformal growth in three-dimensional structures on silicon, making them compatible with complementary metal-oxide-semiconductor (CMOS) technology and ideal for device scaling. However, several challenges still exist for implementing ferroelectric HfO2 in commercial products, such as polarization variation during cycling (wake-up effect), high operation voltage, compatibility with back-end-of-line (BEOL) processing temperatures, and low memory density. In this dissertation, I tackled the challenges outlined above. I began by focusing on the Hf0.5Zr0.5O2 (HZO) material itself and addressing the wake-up effect through the introduction of an HfO2 buffer layer at the HZO/electrode interface. Subsequently, I developed a new measurement setup capable of directly measuring individual nm-sized devices, which enabled investigating the scaling effect in HZO-based ferroelectric capacitors. Through my research, I was able to demonstrate excellent ferroelectricity and reliability in ultra-thin HZO (4 nm) capacitors with molybdenum (Mo) electrodes. These capacitors exhibited low operation voltage, wake-up-free behavior, high endurance, and low RTA temperatures, making them highly desirable for practical applications. I also studied the size scaling effect down to 65 nm × 45 nm devices, where I observed ultra-high remanent polarization (2Pr) for the first time at this scale. In addition to exploring two-dimensional scaling to improve density, I also proposed a hybrid structure for 4 bits/cell storage, increasing the multi-bit capability in a single cell.

Author : M. E. Lines
Publisher : Oxford University Press
Page : 700 pages
File Size : 23,9 MB
Release : 2001-02
Category : Science
ISBN : 9780198507789

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This is a standard work on ferroelectrics.

Author : Byung-Eun Park
Publisher : Springer Nature
Page : 421 pages
File Size : 49,25 MB
Release : 2020-03-23
Category : Technology & Engineering
ISBN : 9811512124

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This book provides comprehensive coverage of the materials characteristics, process technologies, and device operations for memory field-effect transistors employing inorganic or organic ferroelectric thin films. This transistor-type ferroelectric memory has interesting fundamental device physics and potentially large industrial impact. Among various applications of ferroelectric thin films, the development of nonvolatile ferroelectric random access memory (FeRAM) has been most actively progressed since the late 1980s and reached modest mass production for specific application since 1995. There are two types of memory cells in ferroelectric nonvolatile memories. One is the capacitor-type FeRAM and the other is the field-effect transistor (FET)-type FeRAM. Although the FET-type FeRAM claims the ultimate scalability and nondestructive readout characteristics, the capacitor-type FeRAMs have been the main interest for the major semiconductor memory companies, because the ferroelectric FET has fatal handicaps of cross-talk for random accessibility and short retention time. This book aims to provide the readers with development history, technical issues, fabrication methodologies, and promising applications of FET-type ferroelectric memory devices, presenting a comprehensive review of past, present, and future technologies. The topics discussed will lead to further advances in large-area electronics implemented on glass, plastic or paper substrates as well as in conventional Si electronics. The book is composed of chapters written by leading researchers in ferroelectric materials and related device technologies, including oxide and organic ferroelectric thin films.

Author : Masanori Okuyama
Publisher : Springer Science & Business Media
Page : 272 pages
File Size : 24,97 MB
Release : 2005-02-22
Category : Computers
ISBN : 9783540241638

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Ferroelectric thin films continue to attract much attention due to their developing applications in memory devices, FeRAM, infrared sensors, piezoelectric sensors and actuators. This book, aimed at students, researchers and developers, gives detailed information about the basic properties of these materials and the associated device physics. The contributing authors are acknowledged experts in the field.

Author : James F. Scott
Publisher : Springer Science & Business Media
Page : 255 pages
File Size : 20,31 MB
Release : 2013-06-29
Category : Technology & Engineering
ISBN : 3662043076

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This is the first comprehensive book on ferroelectric memories which contains chapters on device design, processing, testing, and device physics, as well as on breakdown, leakage currents, switching mechanisms, and fatigue. State-of-the-art device designs are included and illustrated among the books many figures. More than 500 up-to-date references and 76 problems make it useful as a research reference for physicists, engineers and students.