Author : S-P Hannula
Publisher :
Page : 19 pages
File Size : 24,90 MB
Release : 1986
Category : Indentation testing
ISBN :
In this paper a miniaturized mechanical testing system designed for multiple testing modes is described. The main testing modes include (1) constant displacement rate testing in uniaxial tensile, compressive, and cyclic loading; (2) load relaxation testing; and (3) indentation hardness testing with a controlled displacement rate or displacement (load relaxation) with an indentation probe size as small as a few micrometers in diameter. The system, originally developed for testing materials and interconnecting structures for microelectronic components, is designed so that tests in different modes can be performed with only minor modifications. For room temperature testing, the temperature stability of the system is better than 0.1°C. The maximum loading capacity and displacement range are ~ 100 N and 5 cm, respectively, and the smallest displacements that can be controlled are ~ 0.01 μm.